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Characterization of Metal and Polymer Surfaces. Volume 2: - download pdf or read online

By Lieng-Huang Lee

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Adams, Theoretica Chem. , 39, 321 (1975). 30. (a) H. Basch, Chem. Phys. , 37_, 447 (1976). (b) I. H. Hillier and J. Kendrick, Faraday Trans. II, 1_, 1369 (1975). (c) D. T. Clark, J. Muller, M. F. Guest and W. Rodwell (in preparation). 31. Cf. (a) K. Siegbahn, C. Nordling, G. Johansson, J. Hedman, P. F. Heden, K. Hamrin, U. Gelius, T. Bergmark, L. 0. Werme and Y. Baer, ESCA A p p l i e d t o F ree M o l e c u l e s , North Holland, Amsterdam (1969). (b) T. A. Carlson, M. 0. Krause and W. E. Moddeman, J.

Rates for all three materials were identical to within ± 15% at 2 kv. Sputter rates of Si at other voltages were calculated from the direct proportionality to current density and from tabulated values of ion yield vs. 5 kv as measured with a Faraday cup using a 30 mil aperture. These measurements also showed that the current density was con­ stant across the sample surface (3 mm square bar). 5 kv, the sputter rate for Si was 55, 32 and 18 A/min. These rates were used to calculate sputter depths in polymers.

8 ev or more. The singlet peaks displayed by the silicone polymers increased in width by different amounts for each element after sputtering. For example, the 0-ls, C-ls and Si-2p linewidths of silicone rubber increased by 20, 30 and 40% o after 200 A were sputtered at 2 kv. The organic polymers also showed chemically shifted multiplets for carbon whose relative intensities were altered by sputtering. Quite often initially broad singlets became narrow and vice versa after sputtering. These effects mandated the use of band areas rather than peak heights for elemental analysis.

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